Shutdown tylansige SNF 2009-08-13 21:05:35: won't open

filip at filip at
Thu Aug 13 21:05:35 PDT 2009

after my recipe ran, the door wouldn't open. I waited an hour, and it still wouldn't open. There is N2/Ar leak alarm, which will not clear. Thus, the tube is below ATM, not venting, and will not open.
Please save my wafers in the tube. Also, I already loaded coat8 program, but please don't run it until wafers are removed.

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