Comment tylansige SNF 2009-08-13 21:22:47: nearly complete film

filip at filip at
Thu Aug 13 21:22:47 PDT 2009

after increasing the SiH4 flow from 100 to 200 sccm during seed growth, a nearly complete film formed. There is a small area at the edge (1cm2) that has not been edposited at all.

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