Problem tylansige SNF 2009-07-26 09:18:23: incomplete film

tberg at snf.stanford.edu tberg at snf.stanford.edu
Fri Aug 14 06:19:33 PDT 2009


after increasing the SiH4 flow from 100 to 200 sccm during seed growth, a nearly complete film formed. There is a small area at the edge (1cm2) that has not been edposited at all.




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