From maurice at snf.stanford.edu Mon Dec 7 13:52:20 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Dec 2009 13:52:20 -0800 Subject: Shutdown tylansige SNF 2009-12-07 13:52:19: Won't open Message-ID: user reports that tube is not venting From seymour at snf.stanford.edu Mon Dec 7 14:19:52 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 Dec 2009 14:19:52 -0800 Subject: Shutdown tylansige SNF 2009-12-07 13:52:19: Won't open Message-ID: turned off pump and turned up Nitrogen and tube wouldn't open. Loosened clutch cable and pulled door seal loose form tube end. Tube has not been ran in a long time and I guess the seal and tube end just sort of fused. door seal looked ok and user will close it up and start it. From filip at snf.stanford.edu Mon Dec 7 16:08:26 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 7 Dec 2009 16:08:26 -0800 Subject: Shutdown tylansige SNF 2009-12-07 16:08:25: MFS MALFUNCTION Message-ID: CANNOT MEASURE GAS FLOWS, ABORTED THE RUN From maurice at snf.stanford.edu Mon Dec 7 16:46:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 Dec 2009 16:46:14 -0800 Subject: Shutdown tylansige SNF 2009-12-07 16:08:25: MFS MALFUNCTION Message-ID: Filip running one more run to test system (wafers inside) From filip at snf.stanford.edu Tue Dec 8 09:47:57 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 8 Dec 2009 09:47:57 -0800 Subject: Comment tylansige SNF 2009-12-08 09:47:57: ran CHION OK Message-ID: the recipe ran OK. There were many intermittent errors (MFC 08) that would come and go, but no show stoppers. Maybe there's a loose conntection to the MFC?