From tberg at snf.stanford.edu Thu Jul 2 10:23:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:23:30 -0700 Subject: Shutdown tylansige SNF 2009-06-18 07:36:51: starting temp cal Message-ID: temp cal partially completed. Will stop for now and yellow light it for use at users discretion. Please note any issues From tberg at snf.stanford.edu Thu Jul 2 10:25:20 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 2 Jul 2009 10:25:20 -0700 Subject: Problem tylansige SNF 2009-07-02 10:25:20: Temp cal Terminated Message-ID: Temp cal terminated so users can process wafers. May be some small temp deviations From tberg at snf.stanford.edu Tue Jul 7 07:40:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 7 Jul 2009 07:40:53 -0700 Subject: Shutdown tylansige SNF 2009-07-07 07:40:52: Temp cal Message-ID: From seymour at snf.stanford.edu Thu Jul 9 08:37:21 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Jul 2009 08:37:21 -0700 Subject: Shutdown tylansige SNF 2009-07-09 08:37:20: tube pull and clean Message-ID: From seymour at snf.stanford.edu Thu Jul 9 08:37:49 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Jul 2009 08:37:49 -0700 Subject: Problem tylansige SNF 2009-06-17 23:30:52: Tube has some peelings. Message-ID: cleaning tube at this time. From seymour at snf.stanford.edu Fri Jul 10 07:57:29 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Jul 2009 07:57:29 -0700 Subject: Shutdown tylansige SNF 2009-07-09 08:37:20: tube pull and clean Message-ID: pull and clean completed. tube will need a coat after temp cal completed. From seymour at snf.stanford.edu Tue Jul 14 08:11:26 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Jul 2009 08:11:26 -0700 Subject: Problem tylansige SNF 2009-07-02 10:25:20: Temp cal Terminated Message-ID: temp cal completed From seymour at snf.stanford.edu Tue Jul 14 08:11:43 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Jul 2009 08:11:43 -0700 Subject: Shutdown tylansige SNF 2009-07-07 07:40:52: Temp cal Message-ID: temp cal completed. From seymour at snf.stanford.edu Tue Jul 14 08:12:24 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Jul 2009 08:12:24 -0700 Subject: Shutdown tylansige SNF 2009-07-14 08:12:23: coating tube after pull and clean Message-ID: From seymour at snf.stanford.edu Tue Jul 14 09:01:34 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Jul 2009 09:01:34 -0700 Subject: Problem tylansige SNF 2009-07-14 09:01:33: needs test after pull and clean Message-ID: From seymour at snf.stanford.edu Tue Jul 14 09:16:31 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Jul 2009 09:16:31 -0700 Subject: Shutdown tylansige SNF 2009-07-14 08:12:23: coating tube after pull and clean Message-ID: coat completed needs test From maurice at snf.stanford.edu Wed Jul 15 11:43:58 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Jul 2009 11:43:58 -0700 Subject: Problem tylansige SNF 2009-06-17 14:03:07: temps not stable Message-ID: temp cal complete From maurice at snf.stanford.edu Wed Jul 15 11:45:01 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 15 Jul 2009 11:45:01 -0700 Subject: Comment tylansige SNF 2009-06-23 07:45:21: Germane cylinder changed Message-ID: archive From filip at snf.stanford.edu Fri Jul 17 09:04:51 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 17 Jul 2009 09:04:51 -0700 Subject: Comment tylansige SNF 2009-07-17 09:04:51: incomplete deposition Message-ID: ran Ge dep (CHION) for 2 hours on 2 wafers, and there was incomplete/hazy deposition. Will run coat8 twice and re-try. From filip at snf.stanford.edu Fri Jul 17 09:08:00 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 17 Jul 2009 09:08:00 -0700 Subject: Comment tylansige SNF 2009-07-17 09:08:00: tube status Message-ID: the recipe ran very smoothly, with no major alarms. After adjusting the N2 backflow, all pressure setpoints were met. The temperature was stable. From filip at snf.stanford.edu Fri Jul 17 16:34:30 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Fri, 17 Jul 2009 16:34:30 -0700 Subject: Problem tylansige SNF 2009-07-17 16:34:29: no film deposited (again) Message-ID: the second run of Ge deposition also didn't deposit much film. Loaded 4 wafers, and at most a haze appeared. All gas flows, temps and pressures were OK. The quartz rods are getting more metallic than before. possiblt sige tube needs a thick coat before any further qual runs are attempted. From narii at snf.stanford.edu Sun Jul 19 21:49:31 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 19 Jul 2009 21:49:31 -0700 Subject: Comment tylansige SNF 2009-07-19 21:49:30: Wafers look haze. Message-ID: Used the same recipe which works fine before tempearture calibration. Wafer looks haze and Ge wasn't deposited well. According to tycom console, temperature was ok. From skoh at snf.stanford.edu Tue Jul 21 15:04:24 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 21 Jul 2009 15:04:24 -0700 Subject: Comment tylansige SNF 2009-07-21 15:04:24: Leak Rate higher than usual Message-ID: Base pressure was 0, but Leak pressure was 47mT. It seems unusually high, since it was under 10mT when I ran the tube in June. From seymour at snf.stanford.edu Fri Jul 24 07:31:44 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:31:44 -0700 Subject: Problem tylansige SNF 2009-07-14 09:01:33: needs test after pull and clean Message-ID: test has been done From seymour at snf.stanford.edu Fri Jul 24 07:32:10 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Jul 2009 07:32:10 -0700 Subject: Problem tylansige SNF 2009-07-17 16:34:29: no film deposited (again) Message-ID: there is deposition From filip at snf.stanford.edu Sun Jul 26 09:18:23 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sun, 26 Jul 2009 09:18:23 -0700 Subject: Problem tylansige SNF 2009-07-26 09:18:23: incomplete film Message-ID: edges are nice and shiny, but at the center of the wafer you can see blue color of the underlying oxide. It doesn't deposit the film completely. I checked every step, pressure,temperature and gas flows were OK. Please look into this. This is my 3rd time trying and still no complete film. Recipe: CHION, 6min seed + 1:45 Ge film. From skoh at snf.stanford.edu Thu Jul 30 15:40:22 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Thu, 30 Jul 2009 15:40:22 -0700 Subject: Shutdown tylansige SNF 2009-07-30 15:40:22: Failed Leak Check Message-ID: Ran recipe VARSIGE. Failed leak check with about 15sec left to go in the leak check. After I unloaded my wafers, I ran SIGEPUMP. Since there is only 10sec leak check, the leak check passed. After this, I ran COAT8, the leak check barely passed - PRCPR was about 58 at the end of 1 min. From seymour at snf.stanford.edu Fri Jul 31 08:29:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 31 Jul 2009 08:29:16 -0700 Subject: Shutdown tylansige SNF 2009-07-30 15:40:22: Failed Leak Check Message-ID: fdound leak at door. base now good and leak rate 9 mT/min From seymour at snf.stanford.edu Fri Jul 31 08:41:36 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 31 Jul 2009 08:41:36 -0700 Subject: Shutdown tylansige SNF 2009-07-31 08:41:35: leak rate high Message-ID: after removing leak detector off the teak rate went up. From seymour at snf.stanford.edu Fri Jul 31 09:05:02 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 31 Jul 2009 09:05:02 -0700 Subject: Shutdown tylansige SNF 2009-07-31 08:41:35: leak rate high Message-ID: leak check port required a little more torque to properly seal. Good base pressure leak rate about 8 mT/min From skoh at snf.stanford.edu Fri Jul 31 18:14:18 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Fri, 31 Jul 2009 18:14:18 -0700 Subject: Problem tylansige SNF 2009-07-31 18:14:17: Repump step PRCPR goes to 2000 Message-ID: I noticed for both the VARSIGE and the COAT8 programs, during the repump step right after the leak check, the pressure goes all the way to 2000, and stays there for about 1-2minutes before dropping to regular pressures.