Comment tylansige SNF 2009-07-17 09:04:51: incomplete deposition

filip at snf.stanford.edu filip at snf.stanford.edu
Fri Jul 17 09:04:51 PDT 2009

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ran Ge dep (CHION) for 2 hours on 2 wafers, and there was incomplete/hazy deposition. Will run coat8 twice and re-try.

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