Problem tylansige SNF 2009-07-17 16:34:29: no film deposited (again)

filip at snf.stanford.edu filip at snf.stanford.edu
Fri Jul 17 16:34:30 PDT 2009


the second run of Ge deposition also didn't deposit much film. Loaded 4 wafers, and at most a haze appeared. All gas flows, temps and pressures were OK. The quartz rods are getting more metallic than before.
possiblt sige tube needs a thick coat before any further qual runs are attempted.




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