Comment tylansige SNF 2009-07-19 21:49:30: Wafers look haze.

narii at snf.stanford.edu narii at snf.stanford.edu
Sun Jul 19 21:49:31 PDT 2009


Used the same recipe which works fine before tempearture calibration. Wafer looks haze and Ge wasn't deposited well. According to tycom console, temperature was ok.




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