Problem tylansige SNF 2009-07-26 09:18:23: incomplete film

filip at filip at
Sun Jul 26 09:18:23 PDT 2009

edges are nice and shiny, but at the center of the wafer you can see blue color of the underlying oxide. It doesn't deposit the film completely.
I checked every step, pressure,temperature and gas flows were OK. Please look into this. This is my 3rd time trying and still no complete film.
Recipe: CHION, 6min seed + 1:45 Ge film.

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