Shutdown tylansige SNF 2009-07-30 15:40:22: Failed Leak Check

skoh at snf.stanford.edu skoh at snf.stanford.edu
Thu Jul 30 15:40:22 PDT 2009


Ran recipe VARSIGE. Failed leak check with about 15sec left to go in the leak check.
After I unloaded my wafers, I ran SIGEPUMP.  Since there is only 10sec leak check, the leak check passed.  After this, I ran COAT8, the leak check barely passed - PRCPR was about 58 at the end of 1 min.  




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