Shutdown tylansige SNF 2009-03-22 21:14:09: MFS80 error, pump not work, ? mark shows up

masaharu at masaharu at
Sun Mar 22 21:14:09 PDT 2009

Here is the detail.
I ran COAT8 and there was no SiH4 flow.
Then MFS80 error and ? marks showsed up in the reading.
According to the website:,
There seems no SiH4, 56 out of 1000, almost empty.
I guess this is one of the reason.
Since the pump doesn't work, I left the system as it is:
below ATM, but not vent.
I appreciate immediate inspection. Thank you

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