Shutdown tylansige SNF 2009-03-22 21:14:09: MFS80 error, pump not work, ? mark shows up

tberg at snf.stanford.edu tberg at snf.stanford.edu
Mon Mar 23 07:21:23 PDT 2009


Found system in manual, checked pump looks fine checked SiH4 flow
 looks fine all the way to full flow which is 100 by the way. suggest another test




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