From narii at snf.stanford.edu  Tue May 19 21:36:16 2009
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Tue, 19 May 2009 21:36:16 -0700
Subject: Problem tylansige SNF 2009-05-19 21:36:15: MFS error 08
Message-ID: <mailman.548.1356283830.5077.tylansige-pcs@snf.stanford.edu>

Error occured while running chion recipe. Occured again while trying to run coat8 recipe.



From tberg at snf.stanford.edu  Wed May 20 07:04:41 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 20 May 2009 07:04:41 -0700
Subject: Problem tylansige SNF 2009-05-19 21:36:15: MFS error 08
Message-ID: <mailman.549.1356283830.5077.tylansige-pcs@snf.stanford.edu>

Added oil to pump and restarted. in sige pump now



From skoh at snf.stanford.edu  Wed May 20 17:16:15 2009
From: skoh at snf.stanford.edu (skoh at snf.stanford.edu)
Date: Wed, 20 May 2009 17:16:15 -0700
Subject: Problem tylansige SNF 2009-05-20 17:16:14: Wafer came out non-uniform and brownish on edges
Message-ID: <mailman.550.1356283830.5077.tylansige-pcs@snf.stanford.edu>

Ran CHION recipe, conditions similar to previous runs a few months ago.  Showed wafer to Maurice.  



From tberg at snf.stanford.edu  Wed May 27 06:13:08 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 27 May 2009 06:13:08 -0700
Subject: Problem tylansige SNF 2009-05-20 17:16:14: Wafer came out non-uniform and brownish on edges
Message-ID: <mailman.551.1356283830.5077.tylansige-pcs@snf.stanford.edu>

Checked flows, leak rate and temps OK.     User reports next run was 
 OK



From skoh at snf.stanford.edu  Fri May 29 18:11:41 2009
From: skoh at snf.stanford.edu (skoh at snf.stanford.edu)
Date: Fri, 29 May 2009 18:11:41 -0700
Subject: Shutdown tylansige SNF 2009-05-29 18:11:40: Can't Pump Down
Message-ID: <mailman.552.1356283831.5077.tylansige-pcs@snf.stanford.edu>

Tried to run Coat8 and SiGePump, but tube failed to pump down.  Tube is currently vented.