Problem tylansige SNF 2010-04-07 15:06:05: MFS alarms

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed Apr 7 15:06:06 PDT 2010


I looked at system and it was running coat8 with no alarms shown. I am leaving tool with problem and will keep an eye on it. I will tomorrow flow all gasses and check operation of MFC's




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