From seymour at snf.stanford.edu  Fri Jul 16 14:34:38 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 16 Jul 2010 14:34:38 -0700
Subject: Shutdown tylansige SNF 2010-07-16 14:34:37: MFS error 08
Message-ID: <mailman.659.1356283831.5077.tylansige-pcs@snf.stanford.edu>

H2 interlock alarm. H2 flowed ok in manual. 



From seymour at snf.stanford.edu  Mon Jul 19 10:52:50 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 19 Jul 2010 10:52:50 -0700
Subject: Shutdown tylansige SNF 2010-07-16 14:34:37: MFS error 08
Message-ID: <mailman.660.1356283831.5077.tylansige-pcs@snf.stanford.edu>

replaced channel 4 op amp and zero pot.
Adjusted controller 5 volts to 5.1 from 4.7
checked flows in manual and they looked good.



From seymour at snf.stanford.edu  Mon Jul 19 10:55:45 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 19 Jul 2010 10:55:45 -0700
Subject: Problem tylansige SNF 2010-07-19 10:55:45: needs testing after repair
Message-ID: <mailman.661.1356283831.5077.tylansige-pcs@snf.stanford.edu>

I was gioing to run chion but there are many variables that I have no idea of the values commonly used.



From tberg at snf.stanford.edu  Mon Jul 19 12:32:11 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 19 Jul 2010 12:32:11 -0700
Subject: Comment tylansige SNF 2010-04-30 08:33:39: oil level checked
Message-ID: <mailman.662.1356283831.5077.tylansige-pcs@snf.stanford.edu>

noted



From seymour at snf.stanford.edu  Mon Jul 19 14:59:19 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 19 Jul 2010 14:59:19 -0700
Subject: Comment tylansige SNF 2010-07-19 14:59:18: ran coat8 no problems
Message-ID: <mailman.663.1356283831.5077.tylansige-pcs@snf.stanford.edu>

I loaded coat8 and ran the recipe. I stayed in the back through step 100 and watched all MFC flows. All flowed to setpoint and pressure control kept tube at setpoint also.



From chienyuc at snf.stanford.edu  Mon Jul 19 20:06:16 2010
From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu)
Date: Mon, 19 Jul 2010 20:06:16 -0700
Subject: Problem tylansige SNF 2010-07-19 20:06:15: No Dep
Message-ID: <mailman.664.1356283831.5077.tylansige-pcs@snf.stanford.edu>

Running CHION and the gas flow were all checked normal, and the Ge dep time was 20 minute.  Measured with woolam and found no deposition (less than 1A).  



From chienyuc at snf.stanford.edu  Tue Jul 20 18:34:33 2010
From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu)
Date: Tue, 20 Jul 2010 18:34:33 -0700
Subject: Comment tylansige SNF 2010-07-20 18:34:32: CHION tested ok
Message-ID: <mailman.665.1356283832.5077.tylansige-pcs@snf.stanford.edu>

Running CHION with longer Si seed layer (20 minutes) and the Ge film dep rate is close to previous results.  No pressure nor flow problem observed.
Measured with woolam.  800A SiO2 substrate was used.
Si 500C 200mtoor 00:20:00 15~60A
Ge 300C 400mtorr 00:20:00 160~200A



From maurice at snf.stanford.edu  Wed Jul 21 11:16:43 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 21 Jul 2010 11:16:43 -0700
Subject: Problem tylansige SNF 2010-07-19 20:06:15: No Dep
Message-ID: <mailman.666.1356283832.5077.tylansige-pcs@snf.stanford.edu>

chienyuc reports:
Running CHION with longer Si seed layer (20 minutes) and the Ge film dep rate is close to previous results.  No pressure nor flow problem observed.
Measured with woolam.  800A SiO2 substrate was used.
Si 500C 200mtoor 00:20:00 15~60A
Ge 300C 400mtorr 00:20:00 160~200A



From maurice at snf.stanford.edu  Wed Jul 21 11:17:36 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 21 Jul 2010 11:17:36 -0700
Subject: Problem tylansige SNF 2010-07-19 10:55:45: needs testing after repair
Message-ID: <mailman.667.1356283832.5077.tylansige-pcs@snf.stanford.edu>

chienyuc ran CHION rec...god results