Comment tylansige SNF 2010-07-20 18:34:32: CHION tested ok

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Tue Jul 20 18:34:33 PDT 2010


Running CHION with longer Si seed layer (20 minutes) and the Ge film dep rate is close to previous results.  No pressure nor flow problem observed.
Measured with woolam.  800A SiO2 substrate was used.
Si 500C 200mtoor 00:20:00 15~60A
Ge 300C 400mtorr 00:20:00 160~200A




More information about the tylansige-pcs mailing list