Problem tylansige SNF 2010-03-22 17:19:15: MFS Error:08

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Mon Mar 22 17:19:16 PDT 2010

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After running CHION, the tube cannot pump down during coat8 recipe step 10.  The PRCPR is always 2000 during several trials and sigepump recipe doesn't help as well.

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