From chienyuc at snf.stanford.edu Tue Aug 2 16:24:42 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 2 Aug 2011 16:24:42 -0700 Subject: Problem tylansige SNF 2011-08-02 16:24:40: N2/Ar Backfill problem Message-ID: MFS Alarm during stablization step after Si deposition (step70 of recipe CHION). Got a N2/Ar leak message in the rear display. Manually stopped the program but there is no backfill to vent the tube, so my wafer is still in. From seymour at snf.stanford.edu Wed Aug 3 07:32:37 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 3 Aug 2011 07:32:37 -0700 Subject: Problem tylansige SNF 2011-08-02 16:24:40: N2/Ar Backfill problem Message-ID: adjusted zeros on mfc for N2 did auto zero routine. loaded sigepump. started recipe and checked operation of tube. N2 flows at 310, setpoiont is 300. From tberg at snf.stanford.edu Wed Aug 3 08:24:28 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 3 Aug 2011 08:24:28 -0700 Subject: Comment tylansige SNF 2011-06-13 14:09:16: Germane cylinder changed, ok to run Message-ID: noted From chienyuc at snf.stanford.edu Wed Aug 3 15:57:40 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Wed, 3 Aug 2011 15:57:40 -0700 Subject: Problem tylansige SNF 2011-08-03 15:57:40: Ge film hazy: N2BKFL flowing Message-ID: Ran recipe CHION. In step 70 (stablization before Ge dep) N2BKFL flow became 950-1000 while the setpoint is zero. Other gas flow are correct but it seems the N2 interfere the growth. From chienyuc at snf.stanford.edu Wed Aug 3 16:16:20 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Wed, 3 Aug 2011 16:16:20 -0700 Subject: Comment tylansige SNF 2011-08-03 16:16:20: Additional info to N2BKFL Message-ID: In other steps the control of N2BKFL seems fine like the purge/pump/venting. Step 70 of recipe CHION is just right after turning off SiH4/H2 deposition, and the N2BKFL flow gradually increases to 1000. Didn't get any MFS alarm here. The recipe itself was not modified and no evidence of turning on N2BKFL in recipe, since the set point is always zero. From chienyuc at snf.stanford.edu Tue Aug 9 18:06:01 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 9 Aug 2011 18:06:01 -0700 Subject: Problem tylansige SNF 2011-08-09 18:06:00: Not able to pump down Message-ID: Ran CHION with afrorementioned N2BKFL issue. This run the film quality is as similar as data collected one year before, so the N2 flow during deposition might not be a problem. However the deposition was interrupted for some unknown reason. Found tube open before it should be. After that neither COAT8 nor SIGEPUMP can be run, and both recipe will alarm at early steps due to high PRCPR=2000. Tube is therefore left vented. From tberg at snf.stanford.edu Wed Aug 10 06:19:25 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Aug 2011 06:19:25 -0700 Subject: Shutdown tylansige SNF 2011-08-10 06:19:25: pump is dead Message-ID: From tberg at snf.stanford.edu Wed Aug 10 13:33:29 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Aug 2011 13:33:29 -0700 Subject: Comment tylansige SNF 2011-08-10 13:33:29: Pump is out for repair Message-ID: