Comment tylansige SNF 2011-02-18 13:30:40: CHION tested ok.

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Fri Feb 18 13:30:40 PST 2011


Test CHION recipes and film quality similar to previous runs.
Si: 00:06:00  500C 200 mtorr
Ge: 01:30:00  300C 400 mtorr
measured Ge 830A on oxide dummy by woollam.




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