From tberg at snf.stanford.edu Fri Sep 9 10:15:51 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 9 Sep 2011 10:15:51 -0700 Subject: Problem tylansige SNF 2011-08-09 18:06:00: Not able to pump down Message-ID: Pump Rebuilt and installed. Leak check good. Ready for a test From tberg at snf.stanford.edu Fri Sep 9 10:16:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 9 Sep 2011 10:16:04 -0700 Subject: Shutdown tylansige SNF 2011-08-10 06:19:25: pump is dead Message-ID: Pump Rebuilt and installed. Leak check good. Ready for a test From tberg at snf.stanford.edu Fri Sep 9 10:16:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 9 Sep 2011 10:16:13 -0700 Subject: Comment tylansige SNF 2011-08-10 13:33:29: Pump is out for repair Message-ID: Pump Rebuilt and installed. Leak check good. Ready for a test From tberg at snf.stanford.edu Mon Sep 12 08:21:07 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 08:21:07 -0700 Subject: Shutdown tylansige SNF 2011-09-12 08:21:06: checking alarms Message-ID: From tberg at snf.stanford.edu Mon Sep 12 09:20:42 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 09:20:42 -0700 Subject: Shutdown tylansige SNF 2011-09-12 08:21:06: checking alarms Message-ID: Pump filter possible source of alarms From chienyuc at snf.stanford.edu Mon Sep 12 22:55:58 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Mon, 12 Sep 2011 22:55:58 -0700 Subject: Comment tylansige SNF 2011-09-12 22:55:58: CHION tested ok Message-ID: Ran recipe CHION at the following conditions and got almost identical quality to Aug test results. Good to use now. Si pre-layer: 500C, 200mtorr, SiH4 100sccm, 3min Ge: 300C, 400mtorr, GeH4 20sccm, 90min Got 1100A Ge on oxide dummy, and 1250A on bare Si. Thickness and n/k fitting measured by woollam. Still the N2BKFL reading raises at high PRCPR. From tberg at snf.stanford.edu Tue Sep 13 06:09:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Sep 2011 06:09:04 -0700 Subject: Problem tylansige SNF 2011-08-03 15:57:40: Ge film hazy: N2BKFL flowing Message-ID: user reports test OK From tberg at snf.stanford.edu Tue Sep 13 06:09:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Sep 2011 06:09:20 -0700 Subject: Comment tylansige SNF 2011-08-03 16:16:20: Additional info to N2BKFL Message-ID: user reports test OK From tberg at snf.stanford.edu Tue Sep 13 06:09:39 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Sep 2011 06:09:39 -0700 Subject: Comment tylansige SNF 2011-09-12 22:55:58: CHION tested ok Message-ID: user reports test OK