From gaul at snf.stanford.edu Mon Jun 19 14:04:35 2000 From: gaul at snf.stanford.edu (Keith Gaul) Date: Mon, 19 Jun 2000 14:04:35 -0700 Subject: LPCVD's will be down tomorrow Message-ID: <394E8AE3.7CB617ED@snf.stanford.edu> The burnbox that supports the diffusion area LPCVD's needs a major cleaning tomorrow. It will be shutdown tomorrow morning around 6 a.m. and should be back up early in the afternoon. Keith