From gaul at snf.stanford.edu  Wed Sep 27 09:46:50 2000
From: gaul at snf.stanford.edu (Keith Gaul)
Date: Wed, 27 Sep 2000 09:46:50 -0700
Subject: Silane Cylinder change for furnaces
Message-ID: <39D2247A.90924CEC@snf.stanford.edu>

   All -
     The silane cylinder that supports the furnaces needs to be changed
out. This will happen tomorrow morning around 7:30 and will continue
until Friday morning around 8 a.m. There is plenty of silane until then,
I just didn't want it to run out over the weekend. The tools affected
are:
tylansige
tylanpoly
tylanbpsg
tystar1
               Keith