From seymour at snf.stanford.edu  Thu Mar 15 07:26:43 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Thu, 15 Mar 2001 07:26:43 -0800
Subject: burnbox
Message-ID: <3AB0DF32.DA73B915@snf.stanford.edu>

The temperature of the burnbox is below the setpoint and the system is
in the alarm state. I will disassemble the heater assembly and determine
the problem. I will advise as to the expected down time as soon as
possible.



From amol at stanford.edu  Thu Mar 15 08:15:43 2001
From: amol at stanford.edu (Amol Joshi)
Date: Thu, 15 Mar 2001 08:15:43 -0800 (PST)
Subject: tylansige wand needs replacement
Message-ID: <Pine.GSO.4.31.0103150810030.13517-100000@elaine3.Stanford.EDU>



	Hi Ray,

	I noticed that someone may have used tylansige wand for
loading/unloading wafers in tylan7 which is a metal contaminated furnace.
Please replace it.

	Thanks a lot,

	- Amol



From seymour at snf.stanford.edu  Thu Mar 15 09:42:56 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Thu, 15 Mar 2001 09:42:56 -0800
Subject: burnbox shutdown
Message-ID: <3AB0FF1F.EA81B62B@snf.stanford.edu>

I have a replacement element and I'm installing it now. The burnbox and
the LPCVD's should be up by noon.
Ray Seymour



From seymour at snf.stanford.edu  Thu Mar 15 13:53:25 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Thu, 15 Mar 2001 13:53:25 -0800
Subject: burnbox
Message-ID: <3AB139D5.FBBB0DF8@snf.stanford.edu>

The burnbox is up to temp and the tubes are ok to run.
Ray Seymour