From seymour at snf.stanford.edu  Mon Nov  5 08:13:19 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 05 Nov 2001 08:13:19 -0800
Subject: silane cylinder change
Message-ID: <3BE6BA9F.5378448E@snf.stanford.edu>

I will be changing the silane cylinder on the above tool on Thursday
Nov. 8. This will require a 24 hour leak check so the tubes will be down
till Friday morning if all goes well.



From seymour at snf.stanford.edu  Mon Nov 12 13:57:31 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Mon, 12 Nov 2001 13:57:31 -0800
Subject: burnbox cleans
Message-ID: <3BF045CB.5BF09F81@snf.stanford.edu>

I have had to clean the burnbox three times in the last eight days. This
is primarily due to the increased usage of tylannitride low stress
nitride. Prior to the last few weeks the box required cleaning every two
weeks with a few exceptions. During the times of lower usage I would
schedule the clean for every other Monday morning from 6 am till about 9
am to allow cooling down and the clean. These faster coming cleans do
not allow me to schedule the clean and this requires the shutting down
of the above tool with little to no notice. I am sorry for the
inconvenience this will cause. We are looking into the nitride process
and equipment to see if we can  slow down the burnbox getting clogged
and needing a clean.
Ray Seymour
47425