Tylan10 (nitride) uses only DCS, not silane. I think I should start from 2000 mins. I used 3 mins in tylan8 (sige). The remaining now should be 1997 mins. /chi on > I have used the tylan nitride for a total time of 110 min. So 1890 min > should be left. > > Ali. > > > Example: 2000 min - dep time in minutes = remaining minutes > > > > Dick