Low SiH4 level alert

luscious at stanford.edu luscious at stanford.edu
Sat Oct 5 21:37:24 PDT 2002


 I used tylanbgsg. It should be 1952 minutes.



Quoting Chi On Chui <chion at Stanford.EDU>:

> 
> Tylan10 (nitride) uses only DCS, not silane. I think I should start
> from
> 2000 mins.
> 
> I used 3 mins in tylan8 (sige). The remaining now should be 1997
> mins.
> 
> /chi on
> 
> > I have used the tylan nitride for a total time of 110 min. So 1890
> min
> > should be left.
> >
> > Ali.
> >
> 
> > > Example: 2000 min - dep time in minutes = remaining minutes
> > >
> > > Dick
> 
> 



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