Low SiH4 level alert

[luscious at stanford.edu]

 I used the polysilicon. The remaining time is 1872 minutes.



Quoting luscious at Stanford.EDU:

>  I used tylanbgsg. It should be 1952 minutes.
> 
> 
> 
> Quoting Chi On Chui <chion at Stanford.EDU>:
> 
> > 
> > Tylan10 (nitride) uses only DCS, not silane. I think I should
> start
> > from
> > 2000 mins.
> > 
> > I used 3 mins in tylan8 (sige). The remaining now should be 1997
> > mins.
> > 
> > /chi on
> > 
> > > I have used the tylan nitride for a total time of 110 min. So
> 1890
> > min
> > > should be left.
> > >
> > > Ali.
> > >
> > 
> > > > Example: 2000 min - dep time in minutes = remaining minutes
> > > >
> > > > Dick
> > 
> > 
>