From rcrane at snf.stanford.edu Mon Apr 14 15:50:44 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 14 Apr 2003 15:50:44 -0700 Subject: Reminder 4/21 LP Furnace shutdown Message-ID: <3E9B3B44.318D9E09@snf.stanford.edu> LP furnace users, Just a reminder. The LPCVD furnace shutdown is now on schedule to start at 0600 on Monday, April 21, with a completion date of Wednesday, April 30. This action allows final connection of process gases to the Thermco, bank 1 furnace and will affect SiGe, Poly, Nitride, BPSG, and Tystar tubes. Please plan according. The permits are now in order, contractors have committed, staff is ready and county inspectors are being scheduled. The tie-in and permit required testing should take seven working days. There is a small amount of buffer time built in to this schedule. The issue of county inspections is still being resolved and has the highest change of delay. All work which could be addressed prior to shutdown has been completed. I will issue progress reports as milestones are completed. Furnaces NOT affected by this action: BBr3, POCl3, oxidation (tylan1-4,7), FGA, and TEOS. Thanks for your patience and understanding. This work represents a major step toward six inch processing capability. Dick From rcrane at snf.stanford.edu Tue Apr 22 15:31:18 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 22 Apr 2003 15:31:18 -0700 Subject: Update for gas shutdown for Thermco tie-in Message-ID: <3EA5C2B6.5EA63FE2@snf.stanford.edu> LP furnace users, Great news, the Thermco furnace gas tie-in project is ahead of schedule and proceeding well. Affected gases lines have been purged and tested for residual toxic and pyrophoric gases. Extension tees have been welded and the gas lines now extend to the new furnace. As of early this afternoon, all five gas lines are in 24 hr. pressure test mode with the first of three county inspections scheduled for Wednesday afternoon. Existing furnaces should be back in operation by Tuesday, possibly earlier. This action affects SiGe, Poly, Nitride, BPSG, and Tystar tubes. Furnaces NOT affected by this action: BBr3, POCl3, oxidation (tylan1-4,7), FGA, and TEOS. Thanks for your patience and understanding. This work represents a major step toward six inch processing capability. Dick From rcrane at snf.stanford.edu Mon Apr 28 11:53:44 2003 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 28 Apr 2003 11:53:44 -0700 Subject: Update for gas shutdown for Thermco tie-in Message-ID: <3EAD78B8.BBA64F55@snf.stanford.edu> LP furnace users, Good news concerning the Thermco furnace gas tie-in project: All construction has been completed and the county inspectors have signed off the permits. On Friday maintenance reassembled all gas lines which had been disturbed and started a 24 hr. leak test. B2H6, PH3, DCS, and SiH4 lines passed the test. After a final safety check this morning, process gases will reintroduced to the lines, valve action and MFCs checked, and the processes verified. Tylan SiGe, Tylanpoly, Tystar1 should be operational and "Green lighted" by this afternoon (4/28). This is definitely ahead of schedule. Now the bad news: NH3 did not pass the final leak test, suspected gaskets have been replaced and the NH3 line is back in 24 hr. leak test mode. This action prevents Tylannitride from running until at least mid-day Tuesday. TylanBPSG has a vacuum problem and an electronics control problem, both of which, are currently being addressed. These faults have nothing to do with the gas tie-in project. In a related project completed during this shutdown, the LPCVD furnaces now have an automatic silane cylinder change-over system installed. This system will eliminate the need to budget silane use when approaching cylinder change time, eliminate furnace downtime during the 24 hr. leak check (the test will occur in parallel), and save $$ due to full use of the silane cylinders. This tie-in project went very well thanks the help of Bob Wheeler, Ted Berg, Ray Seymour, Mike Dickey, the four outside contractors, and the various county and Stanford inspectors. Dick -------------- next part -------------- An HTML attachment was scrubbed... URL: