silane cylinder change 3/19
rcrane at snf.stanford.edu
Thu Mar 13 12:13:00 PST 2003
LPCVD silane users,
The silane supply cylinder is approaching its change-out limit.
The change-out will occur at 0700 on 3/19 followed by the mandated, 24
hr. leak test.
Good news, I am told the permit for the auto change-over plumbing has
been issued. Once installed, cylinder change-outs will not interrupt
normal furnace use.
Thanks and sorry for any inconvenience,
More information about the tylansige