Problem wafersaw 2000-12-14 17:16:16: x-y miscalibration (a recurring problem)

jonkurz at snf.stanford.edu jonkurz at snf.stanford.edu
Thu Dec 14 05:16:17 PST 2000


After four cuts in index I, the fifth cut stopped short of the wafer edge.  Since I programmed 4.5" dia for a 3" wafer, this is pretty bad.  I finished the cut by reprogramming for 6" dia, but this time the cut started in the middle of the wafer -- an error which can often lead to disaster.




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