From krishnan at snf.stanford.edu  Sat Feb  3 04:44:35 2001
From: krishnan at snf.stanford.edu (krishnan at snf.stanford.edu)
Date: Feb 3, 2001 4:44:35 PM
Subject: Shutdown wafersaw 2001-02-03 16:44:34: Saw frozen
Message-ID: <mailman.26.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

During my final cut, my wafer became dislodged, so I hit Emergency Stop, after which the saw would not respond to any commands.  



From king at snf.stanford.edu  Mon Feb  5 09:04:44 2001
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Feb 5, 2001 9:04:44 AM
Subject: Shutdown wafersaw 2001-02-03 16:44:34: Saw is working again.
Message-ID: <mailman.27.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

Saw was reinitialized and tested.



From shott at snf.stanford.edu  Fri Feb  9 10:01:43 2001
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Feb 9, 2001 10:01:43 AM
Subject: Shutdown wafersaw 2001-02-09 10:01:42: Temporary shutdown due to acid spill ...
Message-ID: <mailman.28.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

There is nothing wrong with the saw ... but I have shut it down because of the acid spill in the tube cleaning wet bench.
Thanks,
John



From shott at snf.stanford.edu  Fri Feb  9 03:03:48 2001
From: shott at snf.stanford.edu (shott at snf.stanford.edu)
Date: Feb 9, 2001 3:03:48 PM
Subject: Shutdown wafersaw 2001-02-09 10:01:42: Temporary shutdown due to acid spill ...
Message-ID: <mailman.29.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

Acid spill cleared ...
John



From jrim at snf.stanford.edu  Thu Feb 15 10:45:05 2001
From: jrim at snf.stanford.edu (jrim at snf.stanford.edu)
Date: Feb 15, 2001 10:45:05 AM
Subject: Shutdown wafersaw 2001-02-15 10:45:04: 
Message-ID: <mailman.30.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

Unable to calibrate axes, garbage characters on screen. Unoperable



From booth at snf.stanford.edu  Thu Feb 15 04:24:24 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 15, 2001 4:24:24 PM
Subject: Shutdown wafersaw 2001-02-15 10:45:04: 
Message-ID: <mailman.31.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

restarted software & cleared fault on
Theta rotation



From jac at snf.stanford.edu  Tue Feb 20 11:37:47 2001
From: jac at snf.stanford.edu (jac at snf.stanford.edu)
Date: Feb 20, 2001 11:37:47 AM
Subject: Shutdown wafersaw 2001-02-20 11:37:46: o ring broke; piece of o ring rod gone
Message-ID: <mailman.32.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

o ring is broken, o ring rod has segment missing, maybe
inside chuck.



From booth at snf.stanford.edu  Tue Feb 20 03:01:16 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 20, 2001 3:01:16 PM
Subject: Shutdown wafersaw 2001-02-20 11:37:46: o ring broke; piece of o ring rod gone
Message-ID: <mailman.33.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

fished-out last segment of vacuum pin
and installed new O-ring.



From jac at snf.stanford.edu  Wed Feb 21 12:38:09 2001
From: jac at snf.stanford.edu (jac at snf.stanford.edu)
Date: Feb 21, 2001 12:38:09 PM
Subject: Problem wafersaw 2001-02-21 12:38:05: N2 fitting pops off intermittently
Message-ID: <mailman.34.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

3/8" N2 fitting for spindle bearing N2 supply bad.
should be replaced.  has come off repeatedly
during operation.



From mtang at snf.stanford.edu  Fri Feb 23 11:33:59 2001
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Feb 23, 2001 11:33:59 AM
Subject: Problem wafersaw 2001-02-21 12:38:05: N2 fitting pops off intermittently
Message-ID: <mailman.35.1357938985.26017.wafersaw-pcs@snf.stanford.edu>

John Shott checked and tightened fitting.