Problem wafersaw 2001-06-28 11:24:30: wafersaw index II not 90 degrees
booth at snf.stanford.edu
booth at snf.stanford.edu
Tue Jul 3 07:43:45 PDT 2001
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Problem wafersaw 2001-06-28 22:46:44: Interlock Bad, theta good
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Shutdown wafersaw 2001-07-10 11:44:02: wafersaw chuck not rotating
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changed CORAL interlock.
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Problem wafersaw 2001-06-28 22:46:44: Interlock Bad, theta good
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Shutdown wafersaw 2001-07-10 11:44:02: wafersaw chuck not rotating
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