Shutdown wafersaw 2001-07-10 11:44:02: wafersaw chuck not rotating
booth at snf.stanford.edu
booth at snf.stanford.edu
Thu Jul 12 04:59:02 PDT 2001
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Shutdown wafersaw 2001-07-10 11:44:02: wafersaw chuck not rotating
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Problem wafersaw 2001-07-12 17:02:09: Possible X-motion jerkiness
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Repaired Theta drive assembly.
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Shutdown wafersaw 2001-07-10 11:44:02: wafersaw chuck not rotating
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Problem wafersaw 2001-07-12 17:02:09: Possible X-motion jerkiness
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