Problem wafersaw 2002-12-09 13:52:27: Wafersaw problem

rosti at snf.stanford.edu rosti at snf.stanford.edu
Mon Dec 9 01:52:28 PST 2002


I used the wafersaw today to make a single cut. As soon as the cut was finished, it started making a second cut by itself and I hit 'stop' and 'emergency stop' to prevent it from ruining my chips. After that the machine froze. I think the spindle is still spinning and the microscope is above the center of the chuck.
Rosti




More information about the wafersaw-pcs mailing list