From booth at snf.stanford.edu Wed Mar 6 06:52:09 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 6, 2002 6:52:09 AM Subject: Problem wafersaw 2002-02-26 13:40:02: Saw is still flakey ... Message-ID: Occasional flakeyness seems to be normal for the poor thing. It has been working "normally" for the last few days. From storment at snf.stanford.edu Sun Mar 24 09:29:11 2002 From: storment at snf.stanford.edu (storment at snf.stanford.edu) Date: Mar 24, 2002 9:29:11 PM Subject: Problem wafersaw 2002-03-24 21:29:10: Message-ID: The y-offset is drifting around, making it very difficult to cut in the desired location. Also the wafer table (chuck) is so dinged up that I cracked several of my thin substrates. From booth at snf.stanford.edu Wed Mar 27 07:06:56 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 27, 2002 7:06:56 AM Subject: Problem wafersaw 2002-03-24 21:29:10: Wafersaw chuck has been lapped Message-ID: The worst of the gouges have been cleaned up on the chuck surface. From litteken at snf.stanford.edu Thu Mar 28 10:43:01 2002 From: litteken at snf.stanford.edu (litteken at snf.stanford.edu) Date: Mar 28, 2002 10:43:01 AM Subject: Shutdown wafersaw 2002-03-28 10:42:59: Message-ID: wafersaw not responsive....useed emergency stop and unloaded sample....spindle light will not turn off nor will head move away from chuck Chris 5-2634