Shutdown wafersaw 2002-03-28 10:42:59:

litteken at snf.stanford.edu litteken at snf.stanford.edu
Thu Mar 28 10:43:01 PST 2002

Previous message: Problem wafersaw 2002-03-24 21:29:10: Wafersaw chuck has been lapped
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wafersaw not responsive....useed emergency stop and unloaded sample....spindle light will not turn off nor will head move away from chuck
Chris 
5-2634

Previous message: Problem wafersaw 2002-03-24 21:29:10: Wafersaw chuck has been lapped
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