From tbilir at snf.stanford.edu Thu Sep 5 03:16:54 2002 From: tbilir at snf.stanford.edu (tbilir at snf.stanford.edu) Date: Sep 5, 2002 3:16:54 PM Subject: Shutdown wafersaw 2002-09-05 15:16:53: no pos n2 pressure during unload Message-ID: From mtang at snf.stanford.edu Thu Sep 5 03:58:42 2002 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sep 5, 2002 3:58:42 PM Subject: Shutdown wafersaw 2002-09-05 15:16:53: Looks OK-Surface tension maybe? Message-ID: The wafersaw is running fine, and loads/unloads wafers just fine. Perhaps the water was causing the wafer to stick to the chuck? Anyway, I cleared the problem code. From xpxie at snf.stanford.edu Tue Sep 10 06:36:00 2002 From: xpxie at snf.stanford.edu (xpxie at snf.stanford.edu) Date: Sep 10, 2002 6:36:00 PM Subject: Problem wafersaw 2002-09-10 18:36:00: The wafersaw 'emergency stop' button doesn't shine Message-ID: Was OK after I shutdown the machine, but then goes off. From booth at snf.stanford.edu Wed Sep 11 09:37:47 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 11, 2002 9:37:47 AM Subject: Problem wafersaw 2002-09-10 18:36:00: The wafersaw 'emergency stop' button doesn't shine Message-ID: replacled bulb. From arnold at snf.stanford.edu Thu Sep 12 06:28:53 2002 From: arnold at snf.stanford.edu (arnold at snf.stanford.edu) Date: Sep 12, 2002 6:28:53 AM Subject: Shutdown wafersaw 2002-09-12 06:28:52: severe water leak Message-ID: