Shutdown wafersaw 2003-04-10 15:04:17: Report Clear for wafersaw/green light
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Apr 11 11:13:56 PDT 2003
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Shutdown wafersaw 2003-04-10 15:04:17: 'left X axis bad" during initial unload sequence
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system rest. green light
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Shutdown wafersaw 2003-04-10 15:04:17: 'left X axis bad" during initial unload sequence
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