From patlu at snf.stanford.edu Wed Feb 26 11:07:28 2003 From: patlu at snf.stanford.edu (patlu at snf.stanford.edu) Date: Feb 26, 2003 11:07:28 AM Subject: Problem wafersaw 2003-02-26 11:07:26: Report Problem for wafersaw Message-ID: y-offset for test cut way off. I hit stop and now machine needs to be reset From booth at snf.stanford.edu Wed Feb 26 02:09:13 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 26, 2003 2:09:13 PM Subject: Problem wafersaw 2003-02-26 11:07:26: Report Clear for wafersaw Message-ID: had to restart system & do street alignment & checked Y-offset , it was OK. From flannery at snf.stanford.edu Thu Feb 27 05:15:38 2003 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Feb 27, 2003 5:15:38 AM Subject: Problem wafersaw 2003-02-27 05:15:36: Report Problem for wafersaw Message-ID: Connector on camera does not make a good connection. You sometimes have to hold it in to get an image. From booth at snf.stanford.edu Fri Feb 28 07:59:28 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 28, 2003 7:59:28 AM Subject: Problem wafersaw 2003-02-27 05:15:36: Report Clear for wafersaw Message-ID: opened etch chamber & cleaned up loose wafer piece. Installed new Helium Lip Seal, & lip seal clip. Ran 30 min O2 clean. Chamber needs to be seasoned before regular use. From booth at snf.stanford.edu Fri Feb 28 08:08:50 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 28, 2003 8:08:50 AM Subject: Shutdown wafersaw 2003-02-28 08:08:49: Report Shutdown for wafersaw Message-ID: No image on video monitor. From booth at snf.stanford.edu Fri Feb 28 11:11:55 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 28, 2003 11:11:55 AM Subject: Shutdown wafersaw 2003-02-28 08:08:49: Report Clear for wafersaw Message-ID: Repaired video cable, checked camera contacts, secured cable. Picture is clear again.