Problem wafersaw 2003-02-27 05:15:36: Report Clear for wafersaw

booth at snf.stanford.edu booth at snf.stanford.edu
Fri Feb 28 07:59:28 PST 2003


opened etch chamber & cleaned up loose wafer piece.
Installed new Helium Lip Seal, & lip seal clip.
Ran 30 min O2 clean.
Chamber needs to be seasoned before regular use.




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