Problem wafersaw 2003-07-19 01:48:20: Report Clear for wafersaw
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Jul 21 09:38:41 PDT 2003
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Shutdown wafersaw 2003-07-19 21:40:16: CCW bad
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Shutdown wafersaw 2003-07-19 21:40:16: Report Clear for wafersaw
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this fault should have been a shutdown
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Shutdown wafersaw 2003-07-19 21:40:16: Report Clear for wafersaw
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