Problem wafersaw SNF 2004-11-15 07:32:01: Cut depth

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon Nov 15 07:32:02 PST 2004


Jun reported that the cut depth appears to decrease across the wafer, which suggests that the chuck may not be level.  The system also locked up on him upon unload, requiring him to have to remove the wafer with the vacuum on, which led to breaking the wafer.  If the system locks up, please reset (or call a staff member to reset).  If your wafer is on it, turn off the vacuum to unload.  There will still be residual vacuum -- so if your wafer still does not remove easily, then call a staff member.  I'll see about getting the system checked out.




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