From eenriquez at snf.stanford.edu Mon Jul 11 16:03:47 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Jul 2005 16:03:47 -0700 Subject: Shutdown wafersaw SNF 2005-07-11 16:03:47: Chuck being polished Message-ID: Wafer chuck is being polished to remove scratches From eenriquez at snf.stanford.edu Tue Jul 12 14:09:02 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Jul 2005 14:09:02 -0700 Subject: Shutdown wafersaw SNF 2005-07-11 16:03:47: Chuck being polished Message-ID: Installed wafer chuck and ran height calibration routine with no problems. From mtang at snf.stanford.edu Wed Jul 13 07:48:20 2005 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 13 Jul 2005 07:48:20 -0700 Subject: Shutdown wafersaw SNF 2005-07-13 07:48:19: Check level on chuck Message-ID: System is functional, but we will be measuring the flatness on the chuck this morning. Should be OK, but will inform people with reservations if not. From jhaydon at snf.stanford.edu Wed Jul 13 09:06:09 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 13 Jul 2005 09:06:09 -0700 Subject: Shutdown wafersaw SNF 2005-07-13 07:48:19: Check level on chuck Message-ID: chuck has been polished and made parallel to about 0.5mills across a 4 inch wafer. From mtang at snf.stanford.edu Mon Jul 18 07:21:58 2005 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Jul 2005 07:21:58 -0700 Subject: Shutdown wafersaw SNF 2005-07-18 07:21:58: Blade cutting into the chuck Message-ID: Reported problem of the blade intermittently cutting into the chuck. Will be looking into this. From mtang at snf.stanford.edu Mon Jul 18 08:52:48 2005 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Jul 2005 08:52:48 -0700 Subject: Shutdown wafersaw SNF 2005-07-18 07:21:58: Blade cutting into the chuck Message-ID: There are about a couple dozen little cuts on the entry side of the chuck. Not surprising that people may be going through blades. However, I ran a couple of wafers and it looks great. No idea what might be going on. I'm putting the system in yellow, just as a warning of this problem. Everyone: please double-check your parameter settings, particularly wafer thickness and cut depth or depth. Make sure you know your blade parameters. If you see any problems, please report these values and any symptoms you observe on Coral. Thanks! From mtang at snf.stanford.edu Mon Jul 18 08:58:23 2005 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Jul 2005 08:58:23 -0700 Subject: Problem wafersaw SNF 2005-07-18 08:58:23: Blade cutting into chuck Message-ID: One person reported that the blade was cutting into the chuck and broke his blade. Other nick marks on the chuck suggest this has happened a few times since last Monday (when the chuck was polished.) Please be aware of this. If you use the wafersaw, please double-check your blade and wafer parameters and report these and any unusual symptoms if this problem should recur. From davegage at snf.stanford.edu Mon Jul 18 14:42:09 2005 From: davegage at snf.stanford.edu (davegage at snf.stanford.edu) Date: Mon, 18 Jul 2005 14:42:09 -0700 Subject: Problem wafersaw SNF 2005-07-18 14:42:08: contacting chuck Message-ID: I had some problems today with the blade initially contacting the chuck despite the fact that I think my parameters were reasonable. If you are dicing samples that are not supported on another substrate, I recommend leaving considerable room for overshoot between cut depth and sample thickness. From bree at snf.stanford.edu Tue Jul 19 10:24:02 2005 From: bree at snf.stanford.edu (bree at snf.stanford.edu) Date: Tue, 19 Jul 2005 10:24:02 -0700 Subject: Comment wafersaw SNF 2005-07-19 10:24:01: still overshooting Message-ID: The saw is still overshooting in the z-direction before cutting. After two good cuts it also disregarded the wafer diameter and 'landed' right on top of the sample. Recommend starting with ample diameter. From nstein at snf.stanford.edu Wed Jul 20 08:41:40 2005 From: nstein at snf.stanford.edu (nstein at snf.stanford.edu) Date: Wed, 20 Jul 2005 08:41:40 -0700 Subject: Comment wafersaw SNF 2005-07-20 08:41:39: ok Message-ID: From eenriquez at snf.stanford.edu Fri Jul 22 08:30:52 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Jul 2005 08:30:52 -0700 Subject: Problem wafersaw SNF 2005-07-18 14:42:08: contacting chuck Message-ID: Eight users have used the tool with no apparent problems. Will continue to monitor From eenriquez at snf.stanford.edu Fri Jul 22 08:31:30 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Jul 2005 08:31:30 -0700 Subject: Problem wafersaw SNF 2005-07-18 08:58:23: Blade cutting into chuck Message-ID: Eight users have used the tool with no apparent problems. Will continue to monitor . From xzhuan1 at snf.stanford.edu Fri Jul 22 13:08:04 2005 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 22 Jul 2005 13:08:04 -0700 Subject: Problem wafersaw SNF 2005-07-22 13:08:04: can't turn on water Message-ID: From eenriquez at snf.stanford.edu Mon Jul 25 08:44:15 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 25 Jul 2005 08:44:15 -0700 Subject: Problem wafersaw SNF 2005-07-22 13:08:04: can't turn on water Message-ID: Low water pressure. Replaced water filter. From langrock at snf.stanford.edu Mon Jul 25 12:02:32 2005 From: langrock at snf.stanford.edu (langrock at snf.stanford.edu) Date: Mon, 25 Jul 2005 12:02:32 -0700 Subject: Comment wafersaw SNF 2005-07-25 12:02:31: Shutdown Message-ID: Hi, I tried to disable the machine, but CORAL doesn't let me. I used the saw from 11AM to 12PM. From parco at snf.stanford.edu Wed Jul 27 06:37:33 2005 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Wed, 27 Jul 2005 06:37:33 -0700 Subject: Problem wafersaw SNF 2005-07-27 06:37:32: surface cuts on new chuck!!!! Message-ID: I have noticed before I left on vacation (July 14, 2005), that thesurface of the chuck WAS BRAND NEW. NOW, this morning before dicing there are multiple incremental cuts in the chuck on the 1st index and 2nd index position. Has anyone reported this recently by a previous user(s). From eenriquez at snf.stanford.edu Wed Jul 27 08:11:14 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jul 2005 08:11:14 -0700 Subject: Problem wafersaw SNF 2005-07-27 06:37:32: surface cuts on new chuck!!!! Message-ID: This has already been reported. I need to speak to Mary about this problem. I'm not sure if this is an actual machine problem or just a training issue. From me342b at snf.stanford.edu Thu Jul 28 22:28:30 2005 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Thu, 28 Jul 2005 22:28:30 -0700 Subject: Problem wafersaw SNF 2005-07-28 22:28:29: Blade coming down on top of sample Message-ID: Many cuts were good- toward bottom of wafer (closest to user)- blade came down on sample and broke the blade. I pressed "stop" to prevent the saw from progressing. After unloading the wafer, everything seemed to be working alright, but no further cuts were made. From eenriquez at snf.stanford.edu Fri Jul 29 07:45:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jul 2005 07:45:45 -0700 Subject: Comment wafersaw SNF 2005-07-25 12:02:31: Shutdown Message-ID: From eenriquez at snf.stanford.edu Fri Jul 29 07:46:03 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 29 Jul 2005 07:46:03 -0700 Subject: Comment wafersaw SNF 2005-07-20 08:41:39: ok Message-ID: ok From foquetm at snf.stanford.edu Fri Jul 29 17:05:10 2005 From: foquetm at snf.stanford.edu (foquetm at snf.stanford.edu) Date: Fri, 29 Jul 2005 17:05:10 -0700 Subject: Comment wafersaw SNF 2005-07-29 17:05:09: Chuck not flat Message-ID: The chuck definitely looks like it has has a tilt. The right side appears higher than the left.