Shutdown wafersaw SNF 2005-05-31 00:04:29: Stage is out of range.

seoung at snf.stanford.edu seoung at snf.stanford.edu
Tue May 31 00:04:29 PDT 2005


When I unloaded a wafer after finishing my job, I forgot to press the "unload" button and pressed "Stop" and "Emergency Stop" button. Then the stage went far off to the right and was stuck there. I'm sorry for the mistake.




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