Problem wafersaw SNF 2006-02-21 19:12:47: Strange cut

cvenky at snf.stanford.edu cvenky at snf.stanford.edu
Tue Feb 21 19:12:48 PST 2006


I did a lot of cuts today on three 4" wafers which were 475microns thick. All cuts went ok, except for the last cut in which the sawmade a cut on the chuck. This cut was identical to all the previous cuts which were fine.




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