Shutdown wafersaw SNF 2006-05-10 17:34:00: Error message - Theta motor problem

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed May 10 17:34:01 PDT 2006


Not sure what happened -- the machine had been rebooted/reset to recover from a problem a user had.  When I tried realigning (to bring the pin back to 6 o-clock position), the theta motor drove one way and then the other.  When I rebooted again, the calibration procedure gets stuck with the theta motor drive check.  Uh oh.  




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