Shutdown wafersaw SNF 2006-05-10 17:34:00: Error message - Theta motor problem
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Wed May 10 17:34:01 PDT 2006
Not sure what happened -- the machine had been rebooted/reset to recover from a problem a user had. When I tried realigning (to bring the pin back to 6 o-clock position), the theta motor drove one way and then the other. When I rebooted again, the calibration procedure gets stuck with the theta motor drive check. Uh oh.
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