Shutdown wafersaw SNF 2007-04-18 10:32:38: Y-axis (front) Failure
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Apr 25 15:01:24 PDT 2007
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Shutdown wafersaw SNF 2007-04-18 10:32:38: Y-axis (front) Failure
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Comment wafersaw SNF 2007-04-24 11:08:35: Update
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Replaced y axis servo motor amplifier.
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Shutdown wafersaw SNF 2007-04-18 10:32:38: Y-axis (front) Failure
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Comment wafersaw SNF 2007-04-24 11:08:35: Update
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