From mtang at snf.stanford.edu Fri Mar 2 14:11:30 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 2 Mar 2007 14:11:30 -0800 Subject: Problem wafersaw SNF 2007-03-02 14:11:29: Water leak Message-ID: Not a showstopper -- There's a small bucket under the filter, but water seemed to be dripping rather fast... It was overflowing when we came in. From eenriquez at snf.stanford.edu Mon Mar 5 08:25:41 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Mar 2007 08:25:41 -0800 Subject: Shutdown wafersaw SNF 2007-03-05 08:25:41: need to replace water filter housing Message-ID: From eenriquez at snf.stanford.edu Mon Mar 5 12:38:07 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Mar 2007 12:38:07 -0800 Subject: Shutdown wafersaw SNF 2007-03-05 08:25:41: need to replace water filter housing Message-ID: Replaced water filter housing. From eenriquez at snf.stanford.edu Mon Mar 5 12:40:31 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Mar 2007 12:40:31 -0800 Subject: Problem wafersaw SNF 2007-03-02 14:11:29: Water leak Message-ID: Replaced water filter. From auprabhu at snf.stanford.edu Fri Mar 16 12:30:14 2007 From: auprabhu at snf.stanford.edu (auprabhu at snf.stanford.edu) Date: Fri, 16 Mar 2007 12:30:14 -0700 Subject: Comment wafersaw SNF 2007-03-16 12:30:14: spindle overload Message-ID: i experienced spindle overload at 0.45 cut depth with silicon blade. I changed to new blade and reduced cut depth to 0.3 and worked fine. From joshuar at snf.stanford.edu Sat Mar 17 14:17:04 2007 From: joshuar at snf.stanford.edu (joshuar at snf.stanford.edu) Date: Sat, 17 Mar 2007 14:17:04 -0700 Subject: Problem wafersaw SNF 2007-03-17 14:17:04: wafersaw; street alignment on index 2 Message-ID: I cant align index 2 Error read something like, LIMIT STOP STATUS Y AXIS Front Bad From sjo at snf.stanford.edu Wed Mar 21 02:42:49 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Wed, 21 Mar 2007 02:42:49 -0700 Subject: Comment wafersaw SNF 2007-03-21 02:42:48: Spindle Overload & Blade Run-In Message-ID: I had an instance of spindle overload. I had set the wafer diameter to 100mm, but the saw came in early and sunk the blade into the wafer quite suddenly. This cracked the wafer and resulted in the overload condition. Fortunately the blade did not make contact with the chuck, however. To prevent this from happening, the only immediate solution is to generously overstate the wafer diameter - I used 120mm for the 100mm wafer and had no further problems. From mtang at snf.stanford.edu Tue Mar 27 14:29:20 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 Mar 2007 14:29:20 -0700 Subject: Comment wafersaw SNF 2007-03-21 02:42:48: Spindle Overload & Blade Run-In Message-ID: This is a bug in the system. It assumes when you do street alignment that you are roughly in the middle of your substrate. If you specify a round substrate, it will cut a narrower X range near the "top" and "bottom" and wider in the "middle." If you align at the flat, it assumes that this is the middle of your wafer... So, if you align at the flat, use the rectangular substrate or set your diameter to 150 mm. See section 7 (Troubleshooting) of the operating procedures. From mtang at snf.stanford.edu Tue Mar 27 14:30:02 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 Mar 2007 14:30:02 -0700 Subject: Comment wafersaw SNF 2007-03-16 12:30:14: spindle overload Message-ID: Wafersaw seems to be working now. Is it possible the blade was bad? From mtang at snf.stanford.edu Tue Mar 27 14:31:43 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 Mar 2007 14:31:43 -0700 Subject: Problem wafersaw SNF 2007-03-17 14:17:04: wafersaw; street alignment on index 2 Message-ID: System was reset. Not sure why this happened. Is it possible that the "height" calibration was done slightly off-center? In any case, the problem is noted and we will need to keep an eye on this. From mtang at snf.stanford.edu Tue Mar 27 14:35:12 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 27 Mar 2007 14:35:12 -0700 Subject: Comment wafersaw SNF 2007-03-27 14:35:11: Minor issues... Message-ID: A few relatively minor things: 1. The blade removal tool is missing a pin. Please be careful not to overtighten the blade on the spindle. (Elmer/Cesar - can we repair this?) 2. The Y-axis dial is very stiff. 3. The vacuum pin pops out when vacuum is turned off/purge on. Can we replace the o-ring? 4. The Emergency Stop light is burnt out - do we have spare bulbs? Thanks