From lxuwind at snf.stanford.edu  Mon May 14 17:37:52 2007
From: lxuwind at snf.stanford.edu (lxuwind at snf.stanford.edu)
Date: Mon, 14 May 2007 17:37:52 -0700
Subject: Comment wafersaw SNF 2007-05-14 17:37:52: chuck not cleaned thoroughly by previous users
Message-ID: <mailman.641.1357938991.26017.wafersaw-pcs@snf.stanford.edu>

There is obvious residue on the chuck, and it can't be rinsed off by simply rinsing with water.



From cbaxter at snf.stanford.edu  Thu May 24 09:45:43 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 24 May 2007 09:45:43 -0700
Subject: Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.
Message-ID: <mailman.642.1357938991.26017.wafersaw-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri May 25 06:54:24 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 25 May 2007 06:54:24 -0700
Subject: Comment wafersaw SNF 2007-04-01 18:48:31: O-ring, light fixed
Message-ID: <mailman.643.1357938991.26017.wafersaw-pcs@snf.stanford.edu>




From mtang at snf.stanford.edu  Fri May 25 09:09:03 2007
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Fri, 25 May 2007 09:09:03 -0700
Subject: Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.
Message-ID: <mailman.644.1357938991.26017.wafersaw-pcs@snf.stanford.edu>

Tie in done.  Waferesaw is OK.



From avkearne at snf.stanford.edu  Mon May 28 21:58:40 2007
From: avkearne at snf.stanford.edu (avkearne at snf.stanford.edu)
Date: Mon, 28 May 2007 21:58:40 -0700
Subject: Comment wafersaw SNF 2007-05-28 21:58:40: tool left enabled
Message-ID: <mailman.645.1357938991.26017.wafersaw-pcs@snf.stanford.edu>

I found the wafersaw left enabled with no apparent user at 10pm on 05/28