Comment wafersaw SNF 2007-05-14 17:37:52: chuck not cleaned thoroughly by previous users

lxuwind at snf.stanford.edu lxuwind at snf.stanford.edu
Mon May 14 17:37:52 PDT 2007

Next message: Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.
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There is obvious residue on the chuck, and it can't be rinsed off by simply rinsing with water.

Next message: Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.
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